A scanning contact probe for micro CMM
نویسندگان
چکیده
A new high precision contact scanning probe possible to measure miniature components on a micro/nano-CMM is proposed. This contact probe is composed of a fiber stylus with a ball tip, a floating plate and focus sensors. The ball tip is fabricated using optical fiber with melting and solidification processes. The stylus is attached to a floating plate, which is connected to the probe housing via four elastic wires. When the probe tip is touched and then moved by the workpiece the wires will perform elastic deformation and four mirrors mounted onto the plate will be displaced. These displacements can be detected by four corresponding laser focus probes. Experiments were carried out to test the unidirectional touch analog repeatability. The standard deviation is less than 10nm.
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